STI CMP stop in Silicon Nitride controlled by FullVision™ endpoint
A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization | SpringerLink
Impact of Nanotopography on STI CMP in Future Technologies D. Boning and B. Lee, MIT N. Poduje, ADE Corp. J. Valley, ADE Phase-Shift W. Baylies, Baytech. - ppt download
Chemical Mechanical Planarization: Slurry Chemistry, Materials, and Mechanisms
JLPEA | Free Full-Text | Coverage Layout Design Rules and Insertion Utilities for CMP-Related Processes
Impact of wafer transfer process on STI CMP scratches | Semantic Scholar
보고서]반도체 STI CMP용 Ceria 입자 개발 및 특성 평가
Abrasive and additive interactions in high selectivity STI CMP slurries - ScienceDirect
In-situ end point detection of the STI-CMP process using a high selectivity slurry - ScienceDirect
A schematic representation of the STI Process. Note that the... | Download Scientific Diagram
Schematic of STI CMP characterization mask showing the combination of... | Download Scientific Diagram
Consumables for Advanced Shallow Trench Isolation (STI)
Schematic of the SiN CMP process (Reverse STI). | Download Scientific Diagram
Effects of STI-fill thickness on the CMP process defects - ScienceDirect
Keynote Paper CMP Fill Synthesis: A Survey of Recent Studies
Cross section of a wafer surface before (left) and after STI CMP (right). | Download Scientific Diagram